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Scanning Electron Microscopy

Scanning Electron Microscopy Allen R. Sampson Advanced Research Systems December 2, 1996 Index Section 1 - Introduction 1.0 Introduction to scanning electron microscopy 1.1 A brief history of scanning electron microscopy Section 2 - Electron optics 2.0 Electron beam generation 2.01 Tungsten filament cathode 2.02 LaB6 cathode 2.03 Field emission gun 2.04 Cathode comparison 2.1 Electron beam lenses ...

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