electrostatic chuck, chuck power supply, electrostatic chuck processing systems, materials processing, ceramic machining, optical generation, optical lightweighting, diamond machining, laser machining, high voltage power

Products & Services

• • Electrostatic Chuck
  • Electrostatic Chuck Power Supply
  • Electrostatic Chuck Control System
  • High Voltage Power Supply
  • Electrostatic Chuck Systems
  • Vision System Chucks
• • Hard Disk Drive Component
  • Insulating Substrates
  • Silicon Wafer
  • High Temperature Electrostatic Chucks
  • Radio Frequency System

Web Result

Motors

Hardware; Motors ---------------- ---------------- Home Page Wafer Lift Pneumatic Actuators and Motors Pneumatic lift assembly in a PVD system retrofit ... magnetic coupling to the in-vacuum lift rod, and rf isolation: 3-Phase BLDC Servo drives are also available for precision wafer lift with: UHV-compatible rotors inside vacuum; drive coils outside vacuum linear resolution of 30 micron (8mm rotor...

http://electrogrip.com/Egrip2013Products/hardware/Egrip2013SupportHardwareMotors1.htm

GC-3 System Controller

GC-3 Controller ---------------- ---------------- Home Page Electrostatic chuck controls must be coordinated with gas backfill and wafer lift. Electrogrip provides solutions where existing controls are not available: The GC-3 system controller permits an existing system to accept a retrofit electrostatic chuck, require only one input signal to drive: flow controller and gas valves to perform gas b...

http://electrogrip.com/Egrip2013Products/gas%20flow/Egrip2013GC3no1.htm

Gas Flow Control

GC-3 System Controller GFC-2 Low-Flow Controller ---------------- ---------------- Home Page Gas Flow Control Electrostatic chuck controls must be coordinated with gas backfill and wafer lift. Electrogrip provides solutions where existing controls are not available: The GC-3 system controller permits an existing system to accept a retrofit electrostatic chuck, require only one input signal to driv...

http://electrogrip.com/Egrip2013Products/gas%20flow/Egrip2013GasFlowControl1.htm

EgripSupport

Application Notes On-Site Support ---------------- Home Page Electrogrip support services for vacuum processing systems: tutorials on electrostatic chuck operation and installation. on-site diagnosis of electrostatic chuck problems, installation / system qualification of Electrogrip chucks, assurance of operation to specification under process conditions. Please email us for more information. For ...

http://electrogrip.com/Egrip2013HomePlusLinks/Egrip2013Support1.html

DR4 Series

DR4 High Voltage Supply ---------------- ---------------- Home Page The DR4 driver is a high-voltage power supply with adaptive grip and release; two bipolar outputs capable of up to +/-6kV continuous output, and outputs may be floated up to 4kV from ground at plasma bias potential. The DR4 requires a BD3 filter at the chuck location for rf applications. The DR4 can communicate using its serial RS...

http://electrogrip.com/Egrip2013Products/electronics/Egrip2013DR4v1.htm

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