Manufacturer of Rapid Thermal Processing Systems for Semiconductor, LED, Optical, Optoelectronic, and MEMS applications. Products range from entry-level benchtop systems to fully automated 300 mm process tools.

Products & Services

• • Semiconductors
  • Process Equipment
  • Thermal Processing
  • Rta
  • Rtp
  • Rapid Thermal Cvd
• • Furnaces
  • Ovens
  • Uv-ozone
  • Uv-ozone Cleaning
  • Coaters

Web Result

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RTP-800S Rapid Thermal Processing System Return to RTP-800S Easy to use Wide temperature range Accurate temperature control Close temperature uniformity Process repeatability ...

http://www.modularpro.com/Rapid%20Thermal%20Processing.html

MODULAR One(TM)--high throughput RTP production system

The RTP-3000 System An Advanced Rapid Thermal Processing System with Multi-Gas Capabilities The RTP-3000 is a fully automated production system. The system with a 200mm chamber is capable of up to 6" Compound Semiconductor, or with a 300mm chamber up to 12" Silicon wafer processing. Click here for photo image of RTP-3000 300mm configuration Click here for photo image of RTP-3000 compound semicondu...

http://www.modularpro.com/3000P1.html

DESCRIPTION

RTP-800S DESCRIPTION The RTP-800S system is an advanced, stand-alone rapid thermal processing system with multi-gas capabilities. The system processes wafers up to 8" in diameter. The integrated process control system features real time graphics, recipe management, data acquisition and display and has a comprehensive diagnostic function. Click here for photo image of RTP-800S PROCESSES Contact all...

http://www.modularpro.com/800FM.html

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RTP-3000 Advanced Rapid Thermal Processing System for 300mm Wafers RTP-3000 Advanced Rapid Thermal Processing System-shown configured for 300 mm Si wafers. Return to RTP-3000 Cool and process wafers simultaneously 300mm wafer handling Windows-based user interface Touch screen control Dual-arm robot for safe handling of wafers Up to six gas channels Temperature range: 250 deg. C - 1250 deg.C Atmosp...

http://www.modularpro.com/RTP3KFTO.html

Employment Opportunities at Modular Process Technology Corporation

Modular Process Technology Corporation was founded in 1991. The Company is a leading supplier of Rapid Thermal Processing systems. The Company's technology team consists of RTP pioneers, industrial veterans, and experts. The Company takes pride in its leadership for not only supplying state-of-the-art highly reliable equipment, but also in providing break-through process solutions. The Company is ...

http://www.modularpro.com/emplymnt.html

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