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Tek-Vac Industries and what we do.

TEK-VAC INDUSTRIES, Inc. offers forty years of high vacuum and ultra-high vacuum technology experience to our customers in the form of production and R&D semiconductor process equipment. We offer systems which range from simple manual operation to fully automated turnkey. Our expertise includes design of operating system modes in broad temperature and pressure ranges, which provide accurate an...

http://www.tekvac.com/abttvi.htm

FLO-MASTER FM-2001:

FLO-MASTER FM-2001 FEATURES: Direct readout of gas flow rates at any temperature and pressure ove 12 industry standard flow rates: 1, 10, 20, 30, 50, 100, 200, 300, 500 (SCCM); 1, 2, 3, 5 (SLM). ALL IN ONE UNIT !!! Compatible with most mass flow controllers. Units may be linked to control proportional and ratio via computer or by daisy chaining units with one acting as a master and subsequent unit...

http://www.tekvac.com/prd-FM21.htm

Tek-Vac Services

Services offered by Tek-Vac Industries (Please contact us for details) Chemical Vapor Deposition and Reactive Ion Etching: Tek-Vac offers experience with CVD (thermal and plasma enhanced) and RIE for various semiconductor materials such as silicon (amorphous, polycrystalline, epitaxial), silicon nitride, silicon dioxide, aluminum, graphite, high temperature polymers, gallium nitride, and many othe...

http://www.tekvac.com/services.htm

Untitled Document

MAIN PRODUCTS SERVICES SURPLUS & SALE ABOUT US CONTACT Phone: (631) 436-5100 Fax: (631) 436-5154 e-mail: sales@tekvac.com MAP US Credit Cards Accepted Design by B. Yatauro TEK-VAC Industries, Inc. 2011 ...

http://www.tekvac.com/left-bar.html

VARI-VAC GAS METERING VALVES:

VARI-VAC GAS METERING VALVES A Low Cost, Precision Method for Gas Introduction into your Process System. FEATURES Reproducible precision flow rates. A full flow range of interchangeable electropolished 316 S/S flow pins. Helium mass spectrometer leak tight. Right angle and inline designs. Automatic and manual versions. Stainless steel or plated brass valve body construction. Bakeable to 200 C. You...

http://www.tekvac.com/prd-vv-1.html

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